OSCILLATOR DEVICE, OPTICAL DEFLECTOR AND OPTICAL I

专利名称：OSCILLATOR DEVICE, OPTICAL DEFLECTOR

AND OPTICAL INSTRUMENT USING THESAME

发明人：Takahisa Kato,Yukio Furukawa,Takahiro

Akiyama

申请号：US12481472申请日：20090609

公开号：US20090235502A1公开日：20090924

专利附图：

摘要：An oscillator device and a method of producing the same, that enables

adjustment of an inertia moment or a gravity center position of an oscillating memberthrough wide range and at high speed, wherein the oscillating member oscillates aboutan oscillation axis and it includes a movable element and a mass adjusting member , acavity being defined between the movable member and a portion of the mass adjustingmember , such that, in response to irradiation of the mass adjusting member with a laserbeam, a material of the mass adjusting member contiguous to the cavity is partlyremoved, the material being removed thereby including a portion of the mass adjustingmember not irradiated with the laser beam.

申请人：Takahisa Kato,Yukio Furukawa,Takahiro Akiyama

地址：Tokyo JP,Mountain View CA US,Kawasaki-shi JP

国籍：JP,US,JP

更多信息请下载全文后查看