专利名称：CHEMICALS SUPPLY SYSTEM AND ITS USE发明人：FINKENZELLER, ULRICH,DUSEMUND,
CLAUS,SCHWORTSCHIK, THOMAS
申请号：EP98922664.2申请日：19980408公开号：EP1009589A1公开日：20000621
摘要：A new chemicals supply system allows solid-containing suspensions, useful forexample for polishing wafers or in the semiconductor manufacture, to be prepareddirectly at their utilisation site.
申请人：MERCK PATENT GMBH
地址：Frankfurter Strasse 250 64293 Darmstadt DE
国籍：DE
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