Flow temperature controller

专利名称：Flow temperature controller发明人：千歳 範壽,西山 雅史,生方 康弘,柳 繁成申请号：JP2018042561申请日：20180309公开号：JP2019159515A公开日：20190919

专利附图：

摘要：PROBLEM TO BE SOLVED: To provide a flow rate temperature control devicecapable of fine control of fluid temperature and flow rate by a relatively simple controlmechanism and hardly causing vibration and runaway. SOLUTION: A flow rate adjustingmechanism 2 provided in a pipe P through which a fluid flows and capable of adjusting a

flow rate of the fluid, an inlet temperature sensor 3A disposed downstream of the flowrate adjusting mechanism of the pipe, and a downstream side of the inlet temperaturesensor. A heating element 4 disposed in the vicinity of the heating element, an outlettemperature sensor 3B disposed in the vicinity of the heating element, and a control unitC. The heating element output is set and the flow rate is set based on a database storingthe heating element output corresponding to the inlet temperature and the outlettemperature of the fluid at the position of the outlet temperature sensor and the fluidflow rate by the flow rate adjusting mechanism. To adjust the temperature of the fluid.[Selection] Figure 1

申请人：三菱マテリアル株式会社

地址：東京都千代田区丸の内三丁目２番３号

国籍：JP

代理人：杉浦 秀幸

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